Visualization of sputtering dynamics in high-power impulse magnetron sputtering discharge

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Britun, Nikolay; Palmucci, Maria; Konstantinidis, Stéphanos et al.

2014 • AIP International Workshop on Plasma-Surface Interaction

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https://hdl.handle.net/20.500.12907/6358

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Disciplines :

Architecture
Physics

Author, co-author :

Britun, Nikolay ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Palmucci, Maria

Konstantinidis, Stéphanos ; Université de Mons > Faculté des Sciences > Service de Chimie des Interactions Plasma-Surface

Snyders, Rony ; Université de Mons > Faculté des Sciences > Chimie des Interactions Plasma-Surface

Language :

English

Title :

Visualization of sputtering dynamics in high-power impulse magnetron sputtering discharge

Publication date :

10 June 2014

Number of pages :

Event name :

AIP International Workshop on Plasma-Surface Interaction

Event place :

Reims, France

Event date :

2014

Research unit :

S882 - Chimie des Interactions Plasma-Surface

Research institute :

R400 - Institut de Recherche en Science et Ingénierie des Matériaux

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since 12 September 2014

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